|Title of the article||
FORMATION FEATURES OF MICROELECTROMECHANICAL ELEMENTS OF PRIMARY INFORMATION CONVERTERS
Averin Igor' Aleksandrovich, Doctor of engineering sciences, professor, head of sub-department of nanoand
Background. The aim of the work is to analyze technological features of formation of silicon accelerometer crystals - elements of primary information converters based on basic MEMS -technologies. Application of the single-crystal silicon as a structural material in creation of sensors allowed to bring a new level of technical characteristics of the devices that received the common name of MEMS-sensors. One of the most common devices manufactured by MEMS-technologies is a micromechanical accelerometer of capacitive and piezoresistive type.
MEMS, accelerometer, surface and bulk micromechanics.
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